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LN Unit MRE Compact
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The LN Unit MRE compact allows using our manipulators in combination with existing platforms (e.g. Gibraltar Stage) or new LN platform. The developers concentrated on the long time stability, high resolution and reliability of the XYZ manipulator. The new adaptor for the working angle allows variable steppless adjustments of the X- axis (axial movement). |
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Technical Data
| Manual: | 25mm range |
| Motorized: | 22mm range |
| Resolution: | 100nm |
| Repositioning: | less than 1 micron (with CLS less than 200nm) |
| MRE / MLE: | Order-Nr.: 210-100 000 0060 |
| MRM / MLM: | Order-Nr.: 210-100 000 0061 |