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F.A.Q.


Mini Z VARIO

The Mini Z Vario is a very compact and stable Z- axis with a variable range. The modular construction enables to provide a choice of 8, 4 or 2 mm travel with the corresponding resolution. The mechanic resolution has a 10nm by 2mm range, 20nm by 4mm range and 40nm by 8mm range.
It is possible to add the Mini Z vario to all existing LN Mini Units. The new Mini Z vario fits perfectly well to all applications, where high reproducibility and resolution is essential, also where there is a limitation in the height of a XYZ Unit.

Technical Data

Motorized: 2, 4 or 8mm range
Resolution: 10, 20 or 40nm
Repositioning: less than 1 micron
(with CLS less than 20, 40 or 80nm)





Order-Nr.: 200-100 100 5500